「スピンコート」の版間の差分

* S. Middleman and A.K. Hochberg ''Process Engineering Analysis in Semiconductor Device Fabrication'', McGraw-Hill, p. 313 (1993)

* Dirk W. Schubert, Thomas Dunkel; Spin coating from a molecular point of view: its concentration regimes, influence of molar mass and distribution; Materials Research Innovations Vol. 7, p. 314 (2003)

 

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